Schriftenreihe des Fachgebietes Fluidtechnik, Bd. 7
A novel one-dimensional model is being developed to analyse these effects. Depending on the gas rarefaction, the geometry, and the gas-surface interaction, a closure problem arises, which is solved separately using analytical solutions and results from the direct simulation Monte Carlo (DSMC) method. The model is validated by experiments and three-dimensional CFD simulations. Additionally, transient CFD simulations are performed to investigate the chamber filling process with an expanding computational mesh.
Based on these findings, a dimensionless number is derived to quantify both the chamber inhomogeneity and the filling efficiency. This enables an efficient integration of the new model into a chamber model simulation software. A comparison of the simulation results with experimental data of a complete machine confirms the applicability of the model and leads to an excellent agreement.
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