The impact of the bias voltage on the phase composition, residual stress, crystallite size and hardness is analysed and discussed. The formation of partial coherent interfaces between face centred cubic (fcc) (Ti,Al)N and wurtzitic AlN is studied in detail. The microstructural changes due to a thermal treatment are investigated in situ and ex situ. The kinetics of the decomposition process of the metastable fcc-(Ti,Al)N phase is correlated with the initial microstructure that was designed by an energetic ion bombardment. The potential for a specific material design of hard coatings by means of energetic treatment and alloying is shown.
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